Summary of Research Project Results Under the JSPS FY2000
"Research for the future Program"



1.Research Institution Hachinohe Institute of Technology
 
2.Research Area Physical and Engineering Sciences
 
3.Research Field Exploratory Research on Novel Artificial Materials and Substances for Next-Generation Industries
 
4.Term of Project FY1996〜FY2000
 
5.Project Number 96P00105
 
6.Title of Project High Performance Multi-Functional Transducers of Dielectric Composite Films

7.Projetct Leader
Name Institution,Department Title of Position
Masuda, Yoichiro Hachinohe Inst. Tech., Dept. Eng. Prof.

8.Core Members

Names Institution,Department Title of Position
Tsukamoto, Takeyo Sci. Uni. Tokyo, Faculty of Sci. Prof.
Shiosaki, Tadashi Nara Inst. Sci. Tech., Grad. School of Mater. Sci. Prof.
Okada, Masuo Tohoku Univ., Grad. School of Eng. Prof.

9.Cooperating Researchers

Names Institution,Department Title of Position
Fujita, Shigetaka Hachinohe Inst. Tech., Dept. Eng. Prof.
Sugai, Hiroshi Research Inst. for Electric and Magnetic Mater. Seni. Researcher
Masumoto, Hiroshi Tohoku Univ., Inst. Mater. Research Associate Prof.

10.Summary of Research Results

Pb(Zr,Ti)O3(PZT), SrBi2Ta2O9(SBT), and modified BaTiO3(BT) system ferroelectric thin films with well-controlled stoichiometry and microstructure in an atomic-molecular level have been successfully synthesized through physical routes by rf magnetron sputtering and pulsed laser deposition (PLD) methods, and also via chemical routes due to MOCVD, Sol-Gel, Langmuir-Blodgett (LB) methods. Appearance and fatigue mechanisms of ferroelectricity in the thin films were precisely analyzed from a scientific perspective. Further, technology for synthesis of highly functional ferroelectric thin-film devices was developed for application to semiconductor manufacturing process. The principal fruits resulting from our research project are briefly summarized as follows: (1) development of ecological non-lead BTHZ thin film by substitution of small amounts of Hf and Zr for Ti site, which showing superior ferroelectric properties to BT, (2) new design of antiferroelectric-ferroelectric multi thin-film structure, (3) development of ultra thin-film structure with thickness of 30 nm or less by LB methods, (4) confirmation of ferroelectricity in an island structure at early film deposition periods, (5) application of thermally stimulated current (TSC) methods for precise description of electric polarization fatigue mechanism, (6) synthesis of new kinds of oxide thin-film electrodes which enhance the resistance to electric polarization fatigue, (7) establishment of X-ray analysis methods for quantitative thin-film analysis, (8) development of micro manufacturing process of integrated thin-film device structure by electron-beam induced reactions, (9) synthesis of Si-based buffer layer which works a fusion layer between ferroelectric thin-film and semiconductor, (10) evaluation of piezo-electric response of ferroelectric thin film which is applicable to micro actuator, (11) development of new photoconductivity-ferroelectric memory device using pyroelectricity of ferroelectric thin film.

11.Key Words

(1)Ferroelectric Thin Film、(2)Multi-Functional Transducer、(3)Microstructural Control
(4)Ferroelectric Random Access Memory、(5)Ultra Thin Film、(6)Electric Polarization Fatigue
(7)Oxide Electrode、(8)Piezoelectricity、(9)Pyroelectricity

12.References

[Reference Articles]
Author Title of Article
S. Okamura, G. Fujihashi, Y. Yagi, S. Ando, K. Mori and T. Tsukamoto Fabrication of Ferroelectric Bi4Ti3O12 Thin Films by Electron Beam Heating Evaporation
Journal Volume Year Pages Concerned
Trans. Mater. Res. Soc. Jpn. 20 1996 615-618

Author Title of Article
M. Shimizu and T. Shiosaki Growth and Characterization of Pb-based Ferroelectric Oxide Thin Films by MOCVD
Journal Volume Year Pages Concerned
Mat. Res. Soc. Symp. Proc. 401 1996 129-138

Author Title of Article
M. Shimizu, S. Hyodo, H. Fujisawa and T. Shiosaki Step Coverage Pb(Zr, Ti)O3 Thin Films Grown by MOCVD
Journal Volume Year Pages Concerned
Mat. Res. Soc. Symp. Proc. 433 1996 201-206

Author Title of Article
W. Wang, Z. Chen, M. Adachi and A. Kawabata Preparation of Zr-Rich PZT and La-Doped PbTiO3 Thin Films by RF Magnetron Sputtering and Their Properties for Pyroelectric Applications
Journal Volume Year Pages Concerned
Integrated Ferroelectrics 12 1996 251-261

Author Title of Article
Y. Masuda, Y. Kidachi, A. Baba, H. Masumoto, T. Goto and T. Hirai Ferroelectric and Optical Properties of Ba2NaNb5O15 Thin Films
Journal Volume Year Pages Concerned
J. Korean Phys. Soc. 29 1996 S664-667

Author Title of Article
T. Hidaka, T. Maruyama, M. Saitoh, N. Mikoshiba, M. Shimizu, T. Shiosaki, L. A. Wills, R. Hiskes, S. A. Dicarolis and J. Amano Formation and Observation of 50 nm Polarized Domains in PbZr1-xTixO3 Thin Films Using Scanning Probe Microscope
Journal Volume Year Pages Concerned
Appl. Phys. Lett. 68 1996 2358-2359

Author Title of Article
H. Fujisawa, M. Shimizu, T. Horiuchi, T. Shiosaki and K. Matsushige Dependence of Crystalline Structure and Lattice Parameters on Film Thickness in PbTiO3/Pt/MgO Epitaxial Structure
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 35 1996 4913-4918

Author Title of Article
T. Iijima and N. Sanada Ferroelectric Properties of Sol-Gel Derived PbTiO3 Type Thin Films
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 35 1996 4930-4932

Author Title of Article
S. Ando, Y. Nakamura, T. Togami, S. Okamura, A. Baba, Y. Masuda and T. Tsukamoto Ba2NaNb5O15 Thin Films Prepared by Pulsed Laser Ablation Method
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 35 1996 4956-4959

Author Title of Article
R. C. Ibrahim, T. Sakai, T. Nishida, T. Horiuchi, T. Shiosaki and K. Matsushige Characterization of Niobium-Doped Lead Titanate Thin Films
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 35 1996 4995-4998

Author Title of Article
Y. Masuda and A. Baba Oxidation and Heat Treatment Effect on Crystal Structure and Electrical Conductivity of Ferroelectric Pb(Zr, Ti)O3 Films
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 35 1996 5002-5007

Author Title of Article
S. Okamura, Y. Yagi, K. Mori, A. Kakimi, S. Ando and T. Tsukamoto Crystallization of Precursor Micropatterns of Ferroelectric Formed by an Electron Beam
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 35 1996 5224-5228

Author Title of Article
S. Okamura, Y. Yagi, K. Mori, A. Kakimi, S. Ando and T. Tsukamoto Micro Patterning of Ferroelectric Bi4Ti3O12 Using Electron-Beam-Induced Reaction of Metal Octylate Films
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 35 1996 6579-6583

Author Title of Article
G. Fujihashi, A. Kakimi, S. Ando, S. Okamura, T. Tsuchiya and T. Tsukamoto Characterizations of Ba2NaNb5O15 Thin Films prepared by Sol-Gel Method
Journal Volume Year Pages Concerned
J. Ceram. Soc. Jpn. 105 1997 449-451

Author Title of Article
Y. Masuda, H. Masumoto, A. Baba, Y. Kidachi and T. Hirai Ferroelectric Properties of Ba2NaNb5O15 Films by RF Magnetron Sputtering Method
Journal Volume Year Pages Concerned
Ferroelectrics 195 1997 297-304

Author Title of Article
M. Shimizu, H. Fujisawa and T. Shiosaki Effects of La and Nb Modification on the Electrical Properties of Pb(Zr, Ti)O3 Thin Films by MOCVD
Journal Volume Year Pages Concerned
Integrated Ferroelectrics 14 1997 69-75

Author Title of Article
S. Ando, K. Konakahara and T. Tsukamoto Laser Energy Density and O2 Gas Pressure Effects on the Fabrication of Ba2NaNb5O15 Thin Films by Pulsed Laser Ablation
Journal Volume Year Pages Concerned
Ferroelectrics 218 1998 223-232

Author Title of Article
T. Nishida, T. Shiosaki, T. Horiuchi and K. Matsushige Preparation of LiNbO3 Thin Film by Bias Sputtering
Journal Volume Year Pages Concerned
Ferroelectrics 219 1998 9-13

Author Title of Article
T. Shiosaki and M. Shimizu Pb-based and Bi-Based Ferroelectric Thin Films
Journal Volume Year Pages Concerned
J. Korean Phys. Soc. 32 1998 S1316-1320

Author Title of Article
M. Shimizu, H. Fujisawa, S. Hyodo, S. Nakashima, H. Niu, H. Okino and T. Shiosaki Pb(Zr, Ti)O3 Thin Film Deposition on Ir and IrO2 Electrodes by MOCVD
Journal Volume Year Pages Concerned
J. Korean Phys. Soc. 32 1998 S1349-1352

Author Title of Article
Y. Masuda, S. Fujita, A. Baba, H. Masumoto, T. Hirai and K. Nagata BaTi0.91(Hf0.5Zr0.5)0.09 O3 Thin Films Prepared by Nd3+: YAG (1=266 nm) Laser Ablation
Journal Volume Year Pages Concerned
J. Korean Phys. Soc. 32 1998 S1372-1374

Author Title of Article
T. Nishida, T. Horiuhi, T. Shiosaki and K. Matsushige Evaluations of In-plane Orientation of LiNbO3 Films Using an Energy Dispersive Total-Reflection X-ray Diffractometer
Journal Volume Year Pages Concerned
J. Korean Phys. Soc. 32 1998 S1622-1624

Author Title of Article
T. Iijima, J. Onagawa and N. Sanada Effect of Film Thickness on Ferroelectric Properties of Sol-Gel Derived Pb(Ti, Nb)O3 Type Thin Films
Journal Volume Year Pages Concerned
Integrated Ferroelectrics 20 1998 129-140

Author Title of Article
W. Wang, Z. Chen, M. Adachi and A. Kawabata Preparation of Zr-Rich Pb(ZrxTi1-x)O3 Thin Films and Their Properties
Journal Volume Year Pages Concerned
Integrated Ferroelectrics 20 1998 191-203

Author Title of Article
T. Nishida, K. Ishida, T. Horiuhi, T. Shiosaki and K. Matsusige In-Plane Observations of LiNbO3 Thin Films by Energy Dispersive Total-Reflection X-Ray Diffractometer
Journal Volume Year Pages Concerned
Integrated Ferroelectrics 20 1998 243-244

Author Title of Article
T. Tsukamoto and S. Ando Ferroelectric Bi4Ti3O12 Thin Films with c-axis Orientation
Journal Volume Year Pages Concerned
Integrated Ferroelectrics 20 1998 257-258

Author Title of Article
H. Fujisawa, S. Hyodo, K. Jitsui, M. Shimizu, H. Niu, H. Okino and T. Shiosaki Electrical properties of PZT Thin Films on Ir/IrO2 Bottom Electrodes by MOCVD
Journal Volume Year Pages Concerned
Integr. Ferroelctr. 21 1998 107-114

Author Title of Article
Y. Fukuda, K. Numata, K. Aoki, A. Nishimura, G. Fujihashi, S. Okamura, S. Ando and T. Tsukamoto Effects of Postannealing in Oxygen Ambient on Leakage Properties (Ba, Sr)TiO3 Thin-Film Capacitors
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1998 L453-L455

Author Title of Article
R. C. Ibrahim, T. Horiuchi, T. Shiosaki and K. Matsushige Highly Oriented Nb-Doped Lead Titanate Thin Films by Reactive Sputtering:Fabrication and Structure Analyses
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 37 1998 4539-4543

Author Title of Article
W. Wang, T. Karaki and M. Adachi Preparation and Electrical Properties of Sol-Gel Derived Zr-rich Pb(Zr, Ti)O3 Thin Films
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1998 4910-4913

Author Title of Article
H. Sugai, N. Hoshi, T. Iijima and H. Masumoto Preparation of Lead Titanate Thin Films Using Langmuir-Blodgett Method
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 37 1998 5118-5122

Author Title of Article
H. Fujisawa, M. Yoshida, M. Shimizu and H. Niu Influence of the Purity of Source Precursors on the Electrical Properties of Pb(Zr, Ti)O3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 37 1998 5132-5136

Author Title of Article
H. Okino, Y. Toyoda, M. Shimizu, T. Horiuchi, T. Shiosaki and K. Matsushige Thermally Stimulated Current and Polarization Fatigue in Pb(Zr, Ti)O3 Thin Films
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 37 1998 5137-5140

Author Title of Article
S. Ando, K. Konakahara, S. Okamura and T. Tsukamoto Growth of Ba2NaNb5O15 Thin films on MgO(100) by the Pulsed Laser Ablation
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 37 1998 5211-5214

Author Title of Article
H. Fujisawa, S. Nakashima, M. Shimizu and H. Niu Control of Grain Size of Pb(Zr, Ti)O3 Thin Films by MOCVD and the Effect of Size on the Electrical Properties
Journal Volume Year Pages Concerned
Mat. Res. Soc. Symp. Proc. 541 1999 327-332

Author Title of Article
M. Shimizu, M. Yoshida, H. Fujisawa and H. Niu Effects of the Purity of Metalorganic Sources on the Electrical Properties of Pb(Zr, Ti)O3 Thin Films by MOCVD
Journal Volume Year Pages Concerned
Mat. Res. Soc. Symp. Proc. 541 1999 411-416

Author Title of Article
Y. Masuda, S. Fujita, T. Nishida, H. Masumoto, T. Hirai Degradation of Perovskite Pb(Zr, Ti) Thin Films Fabricated by Pulsed Laser Ablation
Journal Volume Year Pages Concerned
Bull. Hachinohe Inst. Tech. 18 1999 59-65

Author Title of Article
A. Watazu, F. Usui, H. Masumoto, Y. Masuda, A. Baba, T. Goto and T. Hirai Preparation of c-axis Oriented Ba2NaNb5O15 Thin Films on Sapphire (012) Substrate and their Properties (in Japanese)
Journal Volume Year Pages Concerned
J. Jpn. Soc. Powder and Powder Metall. 46 1999 909-913

Author Title of Article
S. Okamura and T. Shiosaki Properties of Micropatterned Ferroelectric Thin Films Fabricated by Electron Beam Exposed Chemical Solution Deposition Process
Journal Volume Year Pages Concerned
Ferroelectrics 232 1999 15-24

Author Title of Article
S. Ando, S. Okamura and T. Tsukamoto Preparation of Ba2NaNb5O15 Thin Films by Pulsed Laser Ablation Method and Their Characterization
Journal Volume Year Pages Concerned
J. Eur. Ceram. Soc. 19 1999 1369-1372

Author Title of Article
J. Thongrueng, T. Tsuchiya, Y. Masuda, S. Fujita and K. Nagata Properties and Degradation of Polarization Reversal of Soft BaTiO3 Ceramics for Ferroelectric Thin-Film Devices
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 5309-5313

Author Title of Article
H. Sugai, T. Iijima and H. Masumoto Preparation of Lead Titanate Ultrathin Film Using Langmuir-Blodgett Film as Precursor
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 5322-5325

Author Title of Article
T. Nishida, S. Okamura, T. Shiosaki, S. Fujita and Y. Masuda Preparation of La-modified Lead Titanate Film Capacitors and Influence of SrRuO3 Electrodes on the Electrical Properties
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 5337-5341

Author Title of Article
S. Okamura, S. Miyata, Y. Mizutani, T. Nishida and T. Shiosaki Conspicuous Voltage Shift and Asymmetry Depolarization of Pb-Based Ferroelectric Thin Films
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 5364-5367

Author Title of Article
H. Okino, T. Nishikawa, M. Shimizu, T. Horiuchi and K. Matsushige Electrical Properties oh Highly Strained Epitaxial Pb(Zr, Ti)O3 Thin Films on MgO(100)
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 5388-5391

Author Title of Article
H. Fujisawa, S. Nakashima, K. Kaibara, M. Shimizu and H. Niu Size Effects of Epitaxial and Polycrystalline Pb(Zr, Ti)O3 Thin Films Grown by Metalorganic Chemical Vapor Deposition
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 5392-5396

Author Title of Article
T. Futakuchi, Y. Matsui and M. Adachi Preparation of PbZrO3-PbTiO3-Pb(Mg1/3Nb2/3)O3 Thick Films by Screen Printing
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 5528-5530

Author Title of Article
W. Wang, T. Fujii, T. Karaki and M. Adachi Preparation and Electrical Properties of Rhombohedral Pb(ZrxTi1-x)O3 Thin Films by RF Magnetron Sputtering Method
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 6807-6811

Author Title of Article
M. Shimizu, M. Yoshida, H. Fujisawa and H. Niu Effects of the Purity of Ti Source Precursor on the Electrical Properties of Pb(Zr, Ti)O3 Thin Films Prepared by MOCVD
Journal Volume Year Pages Concerned
J. Korean Phys. Soc. 35 1999 S1529-1531

Author Title of Article
W. Wang, M. Fukui, T. Fujii, T. Karaki ans M. Adachi Electrical Properties of Ziruconium-Rich PZT Thin Films by RF Magnetron Sputterin
Journal Volume Year Pages Concerned
J. Korean Phys. Soc. 35 1999 S1532-1536

Author Title of Article
H. Masumoto, S. Hiboux and P. Muralt Preparation of La1-xSrxCoO3 Electrodes for Ferroelectric Thin Films by RF Magnetron Sputtering
Journal Volume Year Pages Concerned
Ferroelectrics 225 1999 335-341

Author Title of Article
Y. Masuda, S. Fujita and T. Nishida Temperature and Voltage Dependance in PZT Ferroelectric Thin Film Capacitors
Journal Volume Year Pages Concerned
Ferroelectrics 232 1999 59-64

Author Title of Article
K. Nagata, J. Thongrueng, T. Tsuchiya, Y. Masuda and S. Fujita Properties of Soft BaTiO3 Ceramics for Ferroelectric Thin Film Devices
Journal Volume Year Pages Concerned
Key Eng. Mater. 169-170 1999 119-122

Author Title of Article
T. Iijima, N. Sanada, K. Hiyama, H. Tsuboi and M. Okada Preparation of Al Doped PZT Thin Films Using a Sol-Gel Method
Journal Volume Year Pages Concerned
Mat. Res. Soc. Symp. Proc. 596 2000 223-228

Author Title of Article
M. Shimizu, H. Fujisawa and H. Niu Thickness Dependence of Crystalline and Electrical Properties of PZT Ultrathin Films Grown on SrRuO3/SrTiO3 by MOCVD
Journal Volume Year Pages Concerned
Mat. Res. Soc. Symp. Proc. 596 2000 259-264

Author Title of Article
H. Fujisawa, M. Shimizu, H. Niu, K. Honda and S. Ohtani Observations of Domain Structure at Initial Growth Stage of PbTiO3 Thin Films Grown by MOCVD
Journal Volume Year Pages Concerned
Mat. Res. Soc. Symp. Proc. 596 2000 321-326

Author Title of Article
Y. Masuda, S. Fujita, T. Nishida Preparation and Electrical Properties of PZT Thin Film Capacitors for Ferreelectric Random Access Memory
Journal Volume Year Pages Concerned
Bull. Hachinohe Inst. Tech. 19 2000 41-49

Author Title of Article
N. Ikeda, A. Kamegawa, H. Takamura and M. Okada Dielectric Properties of Nb-Doped PbZrO3 Thin Films Prepared by Pulsed Laser Deposition
Journal Volume Year Pages Concerned
Materials Transactions, JIM 41 2000 589-592

Author Title of Article
E. Buixaderas, S. Kamba, J. Petzelt, M. Wada and S. Ando Infrared Spectroscopy of Ba2NaNb5O15
Journal Volume Year Pages Concerned
Ferrolectrics 239 2000 17-24

Author Title of Article
M. Shimizu, S. Nakashima, K. Kaibara, H. Fujisawa and H. Niu Effects of Film Thickness and Grain Size on the Electrical Properties of Pb(Zr, Ti)O3 Thin Films Prepared by MOCVD
Journal Volume Year Pages Concerned
Ferrolectrics 241 2000 183-190

Author Title of Article
W. Wang, T. Karaki and M. Adachi Principle of Photoconductive Ferroelectric Memory and Preliminary Experiments
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 4853-4859

Author Title of Article
H. Kakemoto, K. Kakimoto, S. Fujita and Y. Masuda Preparation and Ferroelectric Properties of Ti-Site Substituted BaTiO3 Thin Film
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 5374-5378

Author Title of Article
J. Thongrueng, K. Nishio, K. Nagata and T. Tsuchiya Preparation and Characterization of Ferroelectric BaTi0.91(Hf0.5, Zr0.5)0.09O3 thin Films by Sol-Gel Process Using Titanium and Zirconium Alkoxides
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 5393-5398

Author Title of Article
T. Iijima, He, Z. Wang, K. Hiyama, H. Tsuboi, M. Okada Ferroelectric Properties of Al-doped Lead Titanate Ziruconate Thin Films Prepared by Chemical Solution Deposition Process
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 5426-5428

Author Title of Article
H. Fujisawa, K. Morimoto, M. Shimizu, H. Niu, K. Honda and S Ohtani Observation of Island Structures at the Initial Growth Stage of PbZrxTi1-xO3 Thin films Prepared by Metalorganic Chemical Vapor Deposition
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 5446-5450

Author Title of Article
M. Kobune, O. Matsuura, T. Matsuzaki, A. Mineshige, S. Fhjii, H. Fujisawa, M. Shimizu and H. Niu Effects of Pt/SrRuO3 Top Electrodes on Ferroelectric Properties of Epitaxial (Pb, La)(Zr, Ti)O3 Thin Films
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 5451-5455

Author Title of Article
S. Okamura, M. Takaoka, T. Nishida and T. Shiosaki Increase in Switching Charge of Ferroelectric SrBi2Ta2O9 Thin Films with Polarization Reversal
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 5481-5484

Author Title of Article
M. Yamaguchi, K. Hiraki, T. Nagatomo and Y. Masuda Preparation and Properties of Bi2SiO5/Si Structures
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 5512-5516

Author Title of Article
J. Thongrueng, K. Nishio, Y. Watanabe, K. Nagata and T. Tsuchiya Preparation and Properties of Soft BaTiO3 Thin Films by Sol-Gel Process
Journal Volume Year Pages Concerned
Key Eng. Mater. 181-182 2000 85-88

Author Title of Article
H. Kakemoto, S. Fujita and Y. Masuda Characterization of BaTi0.91(Hf0.5, Zr0.5)0.09O3 Films Fabricated by Laser Ablation Technique
Journal Volume Year Pages Concerned
Key Eng. Mater. 181-182 2000 89-92

Author Title of Article
K. Kakimoto, H. Kakemoto and Y. Masuda Evaluation for Compositional Deviation between PZT Bulk Target and its Thin Film Synthesized by YAG Laser Deposition (in Japanese)
Journal Volume Year Pages Concerned
J. Ceram. Soc. Jpn. 109 2001 152-158

Author Title of Article
T. Shiosaki, S. Okamura and T. Nishida Influence of Substrate, Thermal, Electric and Aging Treatment on P-E Hysteresis of Ferroelectric Thin Films
Journal Volume Year Pages Concerned
Integrated Ferroelectrics, to be appeared      

Author Title of Article
S. Okamura, T. Hayama, T. Kobayashi, T. Nishida and T. Shiosaki Electrical Properties of Patterned Ferroelectric Thin Films Fabricated by Electron-Beam-Induced Micropatterning Process
Journal Volume Year Pages Concerned
Integrated Ferroelectrics, to be appeared      

Author Title of Article
T. Nishida, M. Takaoka, S. Okamura and T. Shiosaki Low Temperature Fabrication of Ferroelectric SrBi2Ta2O9 Thin Films by Chemical Solution Deposition
Journal Volume Year Pages Concerned
Integrated Ferroelectrics, to be appeared      

Author Title of Article
Y. Masuda, S. Fujita and H. Kakemoto Preparation and Ferroelectric Properties of BaTiO3 Related Thin Film
Journal Volume Year Pages Concerned
Bull. Hachinohe Inst. Tech., to be appeared      

Author Title of Article
K. Kakimoto, S. Fujita and Y. Masuda Ferroelectric SrxBa1-xNb2O6 Synthesized by YAG Laser Deposition
Journal Volume Year Pages Concerned
Bull. Hachinohe Inst. Tech., to be appeared      

Author Title of Article
Y. Masuda, H. Kakemoto and S. Fujita Ferroelectric properties of BaTi0.91(Hf0.5, Zr0.5)0.09O3 film synthesized by pulsed laser deposition method
Journal Volume Year Pages Concerned
Applied Physics A, accepted for publication      

Author Title of Article
T. Iijima, H. Nafe and F. Aldinger Ferroelectric Properties of Al and Nb Doped PbTiO3 Thin Films Prepared by Chemical Solution Deposition Process
Journal Volume Year Pages Concerned
Integrated Ferroelectrics, accepted for publication      

Author Title of Article
T. Iijima, B. P. Zhang and N. Sanada Fabrication of Texture Controlled Lead Zirconate Titanate Film Actuator
Journal Volume Year Pages Concerned
J. Adv. Sci., accepted for publication      

Author Title of Article
K. Kakimoto, H. Kakemoto, A. Baba, S. Fujita and Y. Masuda Synthesis and Dielectric Properties of SrxBa1-xNb2O6 Formed by YAG Laser Ablation
Journal Volume Year Pages Concerned
J. Eur. Ceram. Soc., accepted for publication.      


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