| 1.Research Institution | Tohoku University | |
| 2.Research Area | Physical and Engineering Science | |
| 3.Research Field | Micro-mechatronics and Soft-mechanics | |
| 4.Term of Project | FY1996〜FY2000 | |
| 5.Project Number | 96P00802 | |
| 6.Title of Project | Distributed Micromachines Composed of Many Different Kind Elements |
| Name | Institution,Department | Title of Position |
| Esashi, Masayoshi | Tohoku University, New Industry Creation Hatchery Center | Professor |
8.Core Members
| Names | Institution,Department | Title of Position |
| Hane, Kazuhiro | Tohoku University, Graduate School of Engineering | Professor |
| Koyanagi, Mitsumasa | Tohoku University, Graduate School of Engineering | Professor |
| Shimokohbe, Akira | Tokyo Institute of Technology, Precision and Intelligence Laboratory | Professor |
9.Cooperating Researchers
| Names | Institution,Department | Title of Position |
| Haga, Yoichi | Tohoku University, Graduate School of Engineering | Research Associate |
| Uchiyama, Masaru | Tohoku University, Graduate School of Engineering | Professor |
| Horie, Mikio | Tokyo Institute of Technology, Precision and Intelligence Laboratory | Associate Professor |
10.Summary of Research Results
|
Living organisms have many distributed small molecular elements and these make sensing, communication and information processing and motion functions possible. Distributed micromachines composed of many different kinds of elements as sensors, actuators and circuits have been developed by merging different technologies as materials, optics, electronics and mechanics with semiconductor microfabrication. Active catheters which moves like a snake having diameters of 1〜2mm have been developed. These can be used for diagnosis and therapy in blood vessel and for maintaining complicated machines without disassembly. These could be new machines which can move flexibly as living things owing to their distributed actuators. In addition following achievements were made in Tohoku University; sensors used for the active catheters, actuators like muscles which have distributed elements, microfabrication technologies for the distributed micromachines, opto-electromechanical systems as image processor of three-dimensional stacked chip and distributed control for soft machines composed of many simple elements. In Tokyo Institute of Technology of which subject is combined integrated machines, following results were achieved; thin film metallic glass, alignment method of micro parts, manipulation mechanism, measurement and machining systems for micro structures. The microfabrication methods developed in Tohoku University was applied to the thin film metallic glass developed in Tokyo Institute of Technology and in this way collaborative research has been effectively and successfully carried out in this project. |
11.Key Words
(1)Micromachining、(2)Distributed Micromachine、(3)Micromachine
(4)Semiconductor Microfabrication、(5)Active Catheter、(6)Micro Sensor
(7)Micro Actuator、(8)Microstructure、(9)Thin Film Metallic Glass
12.References
| Author | Title of Article | |||
| N. Esashi | Actuator Distributed Machines Which Move Flexibly (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| J. of the Society of Biomechanisms | 22 | 1998 | 134-139 | |
| Author | Title of Article | |||
| Y. Haga and M. Esashi | Active Catheter and Microsensors for Catheter (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The Japanese Journal of Artificial Organs | 27 | 1998 | 662-670 | |
| Author | Title of Article | |||
| M. Esashi and Y. Haga | Micromachining and Minimal Invasive Medicine (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| Journal of IEE of Japan | 119 | 1999 | 689-691 | |
| Author | Title of Article | |||
| Y. Haga, K. Park and M. Esashi | Active Catheter Using Polymer Links | |||
| Journal | Volume | Year | Pages Concerned | |
| 9th Annual International Meeting, Minimally Invasive, Therapy & Allied Technologies | 9 | 1997 | 56 | |
| Author | Title of Article | |||
| K. -T. Park and M. Esashi, | A Multilink Active Catheter with Polyimide-Based Integrated CMOS Interface Circuits | |||
| Journal | Volume | Year | Pages Concerned | |
| J. of Microelectromechanical Systems | 8 | 1999 | 349-357 | |
| Author | Title of Article | |||
| Y. Haga, M. Esashi and S. Maeda | Small Diameter Active Catheters Using Shape Memory Alloy Coils (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The Transaction of The IEE of Japan | 120E-11 | 2000 | 509-514 | |
| Author | Title of Article | |||
| Y. Haga, M. Esashi and S. Maeda | Thin-walled Tube Supported by Coil Spring for Small Diameter Active Catheters (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The Transaction of The IEE of Japan | 120E-8 | 2000 | 426-431 | |
| Author | Title of Article | |||
| Y. Haga, M. Esashi and S. Maeda | Assembly of Bending, Torsional and Extending Active Catheter Using Electroplating (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The Transaction of The IEE of Japan | 120E-11 | 2000 | 515-520 | |
| Author | Title of Article | |||
| E. Shinohara, K. Minami and M. Esashi | Peristaltic Motion System Like Earthworm (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The Transaction of The IEE of Japan | 119E-6 | 1999 | 334-339 | |
| Author | Title of Article | |||
| M. Nishio, K. Tani, Y. Haga and M. Esashi | Preliminary Study of Integrated Ultrasonic Probe for Forward-Looking in Blood Vessel | |||
| Journal | Volume | Year | Pages Concerned | |
| Technical Digest of the 17th Sensor Symposium | 17 | 2000 | 55-60 | |
| Author | Title of Article | |||
| Y. Liu, X. Li, T. Abe, Y. Haga and M. Esashi | A Thermomechanical Relay with Microspring Contact Array | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. of the Micro Electro Mechanical Systems'2001 | 14 | 2001 | 220-223 | |
| Author | Title of Article | |||
| T. Katsumata, Y. Haga, K. Minami and M. Esashi | Micromachined 125μm Diameter Ultra Miniature Fiber- Optic Pressure Sensor for Catheter | |||
| Journal | Volume | Year | Pages Concerned | |
| The Transaction of The IEE of Japan | 120-E | 2000 | 58-63 | |
| Author | Title of Article | |||
| K. Totsu, Y. Haga and M. Esashi | Magnetic Sensor System for Detecting Position and Orientation of a Catheter Tip (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The Transaction of The IEE of Japan | 120E-5 | 2000 | 211-218 | |
| Author | Title of Article | |||
| T. Tomiyoshi, K. Minami and M. Esashi | Distributed Optical Bending Sensors with Bragg Gratings in Optical Waveguide | |||
| Journal | Volume | Year | Pages Concerned | |
| Intn. Conf. on Optical MEMS and Their Applications | 1 | 1997 | 200-205 | |
| Author | Title of Article | |||
| G. Suzuki and M. Esashi | Planer Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. of the Micro Electro Mechanical Systems'2000 | 13 | 2000 | 46-51 | |
| Author | Title of Article | |||
| S. Wang, J. F. Li, X. Li and M. Esashi | Processing of PZT Microstructures | |||
| Journal | Volume | Year | Pages Concerned | |
| Sensors and Materials | 10 | 1998 | 375-384 | |
| Author | Title of Article | |||
| D. W. Lee, T. Ono, S. Tanaka, T. Abe and M. Esashi | Fabrication of Microprobe Array with Sub-100nm Nano-Heater for Nanometric Thermal Imaging and Data Storage | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. of the Micro Electro Mechanical Systems'2001 | 14 | 2001 | 204-207 | |
| Author | Title of Article | |||
| X. Li, T. Abe, Y. Liu and M. Esashi | High Density Electrical Feedthrough Fabricated by Deep Reactive Ion Etching of Pyrex Glass | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. of the Micro Electro Mechanical Systems'2001 | 14 | 2001 | 98-101 | |
| Author | Title of Article | |||
| K. Minami, H. Morishita and M. Esashi | A Bellows-shape Electrostatic Microactuator | |||
| Journal | Volume | Year | Pages Concerned | |
| Sensors and Actuators | 72 | 1999 | 269-276 | |
| Author | Title of Article | |||
| T. Ono, D. Y. Sim and M. Esashi | Micro-discharge and Electric Breakdown in a Micro-gap | |||
| Journal | Volume | Year | Pages Concerned | |
| J. Micromech. Microeng | 10 | 2000 | 445-451 | |
| Author | Title of Article | |||
| S. Wang, J. F. Li, R. Watanabe and M. Esashi | Fabrication of Lead Zirconate Titanate Microrods for 1-3 Piezo-composites Using Hot Isostatic Pressing with Silicon Molds | |||
| Journal | Volume | Year | Pages Concerned | |
| J. American Ceramic Soc. | 82 | 1999 | 213-215 | |
| Author | Title of Article | |||
| S. Wang, J. F. Li, K. Wakabayashi, M. Esashi and R. Watanabe | Lost Silicon Mold Process for PZT Microstructures | |||
| Journal | Volume | Year | Pages Concerned | |
| Advanced Materials | 11 | 1999 | 873-876 | |
| Author | Title of Article | |||
| J. -F. Li, S. Wang, K. Wakabayashi, M. Esashi and R. Watanabe | Properties of Modified Lead Zirconate Titanate Ceramics Prepared at Low Temperature (800℃) by Hot Isostatic Pressing | |||
| Journal | Volume | Year | Pages Concerned | |
| J. American Ceramic Soc. | 83 | 2000 | 955-957 | |
| Author | Title of Article | |||
| S. Sugimoto, S. Tanaka, J. F. Li, R. Watanabe and M. Esashi | Silicon Carbide Micro-reaction-sintering Using a Multilayer Silicon Mold | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. of the Micro Electro Mechanical Systems'2000 | 13 | 2000 | 775-780 | |
| Author | Title of Article | |||
| S. Wang, X. Li, K. Wakabayashi and M. Esashi | Deep Reactive Ion Etching of Lead Zirconate Titanate Using Sulfur Hexafluoride Gas | |||
| Journal | Volume | Year | Pages Concerned | |
| J. American Ceramic Soc. | 82 | 1999 | 1339-1341 | |
| Author | Title of Article | |||
| T. Abe, K. Wakabayashi, X. Li and M. Esashi | Development of Deep Reactive Ion Etching System for Hard-Etching Materials | |||
| Journal | Volume | Year | Pages Concerned | |
| Technical Digest of the 17th Sensor Symposium | 17 | 2000 | 255-258 | |
| Author | Title of Article | |||
| S. Watanabe, M. Esashi and Y. Yamashita | Fabrication Methods for High Aspect Ratio Microstructures | |||
| Journal | Volume | Year | Pages Concerned | |
| J. of Intelligent Material Systems and Structures | 8 | 1997 | 173-176 | |
| Author | Title of Article | |||
| K. Yoshida, K. Minami and M. Esashi | Low Temperature Deposition of Conductive Material by UV Laser CVD | |||
| Journal | Volume | Year | Pages Concerned | |
| Technical Digest of the 17th Sensor Symposium | 17 | 2000 | 289-292 | |
| Author | Title of Article | |||
| M. Sasaki, S. Nogawa and K. Hane | Direct Photolithography on Optical Fiber | |||
| Journal | Volume | Year | Pages Concerned | |
| Intern. Conf. on Optical MEMS | 3 | 2000 | 149-150 | |
| Author | Title of Article | |||
| T. Takoshima, W. Narazaki, K. Wada, H. Kitazume, S. Motoyama, Y. Liu, S. Hata and A. Shimokohbe | Development of Miniaturized Probe Pins for LSI Testing using Micromachine Technology (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| 2001 National Convention Record I. E. E. Japan | 2001 | 1078 | ||
| Author | Title of Article | |||
| M. Sasaki, H. Takebe, K. Hane | Transmission type position sensor for straightness measurement of large structure | |||
| Journal | Volume | Year | Pages Concerned | |
| J. Micromech. Microeng. | 9 | 1999 | 429-433 | |
| Author | Title of Article | |||
| M. Sasaki, W. Kamada, K. Hane | Two dimentional control of shape memory alloy actuators for aligning a Si micromachined pinhole for spatial filter | |||
| Journal | Volume | Year | Pages Concerned | |
| Jpn. J. Appl. Phys. | 38 | 1999 | 7190-7193 | |
| Author | Title of Article | |||
| K. W. Lee, T. Nakamura, K. Sakuma, K. T. Park, H. Shimazutsu, N. Miyakawa, K. Y. Kim, H. Kurino and M. Koyanagi | Development of Three-Dimensional Integration Technology for Highly Parallel Image-Processing Chip | |||
| Journal | Volume | Year | Pages Concerned | |
| Jpn. J. Appl. Phys. | 39 | 2000 | 2473-2477 | |
| Author | Title of Article | |||
| Y. Kuwana, A. Hirose, H. Kurino and M. Koyanagi | Signal Propagation Characteristics in Polyimide Optical Wave-guide with Micro-Mirrors for Optical Multichip Module | |||
| Journal | Volume | Year | Pages Concerned | |
| Jpn. J. Appl. Phys. | 38 | 1999 | 2660-2663 | |
| Author | Title of Article | |||
| K. Munawar, M. Esashi and M. Uchiyama | An Approach Towards Decentralized Control of Cooperating Non-autonomous Multiple Robots | |||
| Journal | Volume | Year | Pages Concerned | |
| Robotica | 18 | 2000 | 495-504 | |
| Author | Title of Article | |||
| K. Munawar, M. Kawaguchi, K. Abe and M. Uchiyama | Design and development of a soft joints robotic manipulator | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. Japan IFToMM Symp. | 2000 | 30-37 | ||
| Author | Title of Article | |||
| S. Hata, K. Wada, K. Sato and A. Shimokohbe | Fabrication of Micro Structures using Thin Film Metallic Glass (2nd. Report) - Fabrication and micro-machining of Pd based thin film metallic glass - (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. Spring meeting of JSPE | 2000 | 401 | ||
| Author | Title of Article | |||
| S. Hata, L. Yongdong, T. Kato and A. Shimokohbe | Fabrication of Micro Structures using Thin Film Metallic Glass (3rd. Report)- Fabrication method for three dimensional micro structure using supercooled liquid state - (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. Autumn meeting of JSPE | 2000 | 401 | ||
| Author | Title of Article | |||
| M. Horie T. Uchida and D. Kamiya | A Pantograph Mechanism with Large-deflective Hinges for Miniature Surface mount Systems (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| Trans. of JSME | 66 | 2000 | 2804-2809 | |
| Author | Title of Article | |||
| T. Matuo, H. Hasizume and H. Shinno | Performance Evaluations of the Developed Micro-Sensor for In-Process Machining Status Monitoring (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The 2nd Manufacturing & Machine Tool Conference | 2000 | 161-162 | ||
| Author | Title of Article | |||
| K. Takahashi and T. Hatuzawa | Improvement of Production Reproducibility of Tungsten Probe using electropolishing (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The Trans. of The IEE of Japan | 120-E | 2000 | 398-404 | |
| Author | Title of Article | |||
| T. Oguchi, M. Hayase and T. Hatuzawa | A hysteresis movement analysis of micro-cantilever with constant bending moment driven by electro-static force (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| The Trans. of The IEE of Japan | 120-E | 2000 | 489-502 | |
| Author | Title of Article | |||
| K. Sato, M. Furuya, F. Shinano, T. Shinshi H. Tachikawa and A. Shimokohbe | Control Performance of Two-stage Positioning System (Comparison of Positioning performances with Four Kinds of Control Methods) (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| Trans. of JSME | 66 | 2000 | 885-892 | |
| Author | Title of Article | |||
| K. Sato, S. Sinozuka, T. Shinshi and A. Shimokohbe | Control Performance of Two-stage Positioning System with Intelligent Control Methods (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| Trans. of JSME | 66 | 2000 | 2736-2741 | |
| Author | Title of Article | |||
| K. Sato, K. Ito, S. Hata and A. Shimokohbe | Self-alignment of Microparts Using Liquid Surface Tension (Relationship between Alignment Accuracy and Behavior of Microparts and Liquid) (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. of JSME IIP200 | 2000 | 137-140 | ||
| Author | Title of Article | |||
| K. Sato, K. Ito, S. Hata and A. Shimokohbe | Self-alignment of Microparts Using Liquid Surface Tension-Effect of High Wettability Area Pattern on Alignment Performance- (in Japanese) | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. Autumn meeting of JSPE | 2000 | 400 | ||
| Author | Title of Article | |||
| L. Yongdong, S. Hata, K. Wada and A. Shimokohbe | Physical properties of Pd-based thin film metallic glass | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. Autumn meeting of JSPE | 2000 | 402 | ||
| Author | Title of Article | |||
| L. Yongdong, S. Hata, K. Wada and A. Shimokohbe | Thin Film Metallic Glasses: Fabrication and Property Test | |||
| Journal | Volume | Year | Pages Concerned | |
| The 14th IEEE International Conference on MEMS 2001 | 14 | 2001 | 102-105 | |
| Author | Title of Article | |||
| M. Horie, D. Kamiya, M. Urata and K. Ikegami | New Miniature Pantograph Mechanisms with Large-Deflective Hinges for Micro-Bonding by Adhesives | |||
| Journal | Volume | Year | Pages Concerned | |
| International Symposium On Electronic Materials and Packaging ( EMAP2000 ) | 2000 | 167-174 | ||
| Author | Title of Article | |||
| M. Horie S. Torii and D. Kamiya | Displacement Characteristics of Micro-Hinges with Suitable Flexural Rigidity for Micromechanisms | |||
| Journal | Volume | Year | Pages Concerned | |
| Proceeding of Sixth International Conference on Control, Automation, Robotics and Vision (ICARCV2000) | 6 | 2000 | 52-56 | |
| Author | Title of Article | |||
| M. Horie, T. Uchida and D. Kamiya | Development of a Pantograph Mechanism with Large-deflective Hinges for Miniature Surface Mount Systems | |||
| Journal | Volume | Year | Pages Concerned | |
| Proceeding of Design, Test, Integration, and Packaging (DTIP) of MEMS/MOEMS | 4019 | 2000 | 546-555 | |
| Author | Title of Article | |||
| H. Hashizume, H. Yoshioka and H. Shinno | In-Process Monitoring of Thermal Behavior near the Cutting Point during Ultraprecision Machining | |||
| Journal | Volume | Year | Pages Concerned | |
| Proc. of 2nd Euspen International Conference | 2001 | In press | ||
| Author | Title of Book | ||
| T. Ono and M. Esashi | Sensors Update | ||
| Publisher | Year | Pages | |
| Wiley-VCH | 1999 | 163-188 | |
| Author | Title of Book | ||
| Y. Haga, T. Mineta Ono and M. Esashi | Sensors Update | ||
| Publisher | Year | Pages | |
| Wiley-VCH | 1999 | 147-186 | |
| Author | Title of Book | ||
| M. Esashi | AERA Mook, Understand Engineering (in Japanese) | ||
| Publisher | Year | Pages | |
| Asahi News Paper | 2001 | 58-61 | |
| Author | Title of Book | ||
| K. Sato | Present and Future Technology of Ultraprecision Positioning (in Japanese) | ||
| Publisher | Year | Pages | |
| Fiji Techno Systems | 2000 | 488-492 | |