Summary of Research Project Results Under the JSPS FY2000
"Research for the future Program"



1.Research Institution Tohoku University
 
2.Research Area Physical and Engineering Science
 
3.Research Field Micro-mechatronics and Soft-mechanics
 
4.Term of Project FY1996〜FY2000
 
5.Project Number 96P00802
 
6.Title of Project Distributed Micromachines Composed of Many Different Kind Elements

7.Projetct Leader
Name Institution,Department Title of Position
Esashi, Masayoshi Tohoku University, New Industry Creation Hatchery Center Professor

8.Core Members

Names Institution,Department Title of Position
Hane, Kazuhiro Tohoku University, Graduate School of Engineering Professor
Koyanagi, Mitsumasa Tohoku University, Graduate School of Engineering Professor
Shimokohbe, Akira Tokyo Institute of Technology, Precision and Intelligence Laboratory Professor

9.Cooperating Researchers

Names Institution,Department Title of Position
Haga, Yoichi Tohoku University, Graduate School of Engineering Research Associate
Uchiyama, Masaru Tohoku University, Graduate School of Engineering Professor
Horie, Mikio Tokyo Institute of Technology, Precision and Intelligence Laboratory Associate Professor

10.Summary of Research Results

Living organisms have many distributed small molecular elements and these make sensing, communication and information processing and motion functions possible. Distributed micromachines composed of many different kinds of elements as sensors, actuators and circuits have been developed by merging different technologies as materials, optics, electronics and mechanics with semiconductor microfabrication.
Active catheters which moves like a snake having diameters of 1〜2mm have been developed. These can be used for diagnosis and therapy in blood vessel and for maintaining complicated machines without disassembly. These could be new machines which can move flexibly as living things owing to their distributed actuators. In addition following achievements were made in Tohoku University; sensors used for the active catheters, actuators like muscles which have distributed elements, microfabrication technologies for the distributed micromachines, opto-electromechanical systems as image processor of three-dimensional stacked chip and distributed control for soft machines composed of many simple elements. In Tokyo Institute of Technology of which subject is combined integrated machines, following results were achieved; thin film metallic glass, alignment method of micro parts, manipulation mechanism, measurement and machining systems for micro structures. The microfabrication methods developed in Tohoku University was applied to the thin film metallic glass developed in Tokyo Institute of Technology and in this way collaborative research has been effectively and successfully carried out in this project.

11.Key Words

(1)Micromachining、(2)Distributed Micromachine、(3)Micromachine
(4)Semiconductor Microfabrication、(5)Active Catheter、(6)Micro Sensor
(7)Micro Actuator、(8)Microstructure、(9)Thin Film Metallic Glass

12.References

[Reference Articles]
Author Title of Article
N. Esashi Actuator Distributed Machines Which Move Flexibly (in Japanese)
Journal Volume Year Pages Concerned
J. of the Society of Biomechanisms 22 1998 134-139

Author Title of Article
Y. Haga and M. Esashi Active Catheter and Microsensors for Catheter (in Japanese)
Journal Volume Year Pages Concerned
The Japanese Journal of Artificial Organs 27 1998 662-670

Author Title of Article
M. Esashi and Y. Haga Micromachining and Minimal Invasive Medicine (in Japanese)
Journal Volume Year Pages Concerned
Journal of IEE of Japan 119 1999 689-691

Author Title of Article
Y. Haga, K. Park and M. Esashi Active Catheter Using Polymer Links
Journal Volume Year Pages Concerned
9th Annual International Meeting, Minimally Invasive, Therapy & Allied Technologies 9 1997 56

Author Title of Article
K. -T. Park and M. Esashi, A Multilink Active Catheter with Polyimide-Based Integrated CMOS Interface Circuits
Journal Volume Year Pages Concerned
J. of Microelectromechanical Systems 8 1999 349-357

Author Title of Article
Y. Haga, M. Esashi and S. Maeda Small Diameter Active Catheters Using Shape Memory Alloy Coils (in Japanese)
Journal Volume Year Pages Concerned
The Transaction of The IEE of Japan 120E-11 2000 509-514

Author Title of Article
Y. Haga, M. Esashi and S. Maeda Thin-walled Tube Supported by Coil Spring for Small Diameter Active Catheters (in Japanese)
Journal Volume Year Pages Concerned
The Transaction of The IEE of Japan 120E-8 2000 426-431

Author Title of Article
Y. Haga, M. Esashi and S. Maeda Assembly of Bending, Torsional and Extending Active Catheter Using Electroplating (in Japanese)
Journal Volume Year Pages Concerned
The Transaction of The IEE of Japan 120E-11 2000 515-520

Author Title of Article
E. Shinohara, K. Minami and M. Esashi Peristaltic Motion System Like Earthworm (in Japanese)
Journal Volume Year Pages Concerned
The Transaction of The IEE of Japan 119E-6 1999 334-339

Author Title of Article
M. Nishio, K. Tani, Y. Haga and M. Esashi Preliminary Study of Integrated Ultrasonic Probe for Forward-Looking in Blood Vessel
Journal Volume Year Pages Concerned
Technical Digest of the 17th Sensor Symposium 17 2000 55-60

Author Title of Article
Y. Liu, X. Li, T. Abe, Y. Haga and M. Esashi A Thermomechanical Relay with Microspring Contact Array
Journal Volume Year Pages Concerned
Proc. of the Micro Electro Mechanical Systems'2001 14 2001 220-223

Author Title of Article
T. Katsumata, Y. Haga, K. Minami and M. Esashi Micromachined 125μm Diameter Ultra Miniature Fiber- Optic Pressure Sensor for Catheter
Journal Volume Year Pages Concerned
The Transaction of The IEE of Japan 120-E 2000 58-63

Author Title of Article
K. Totsu, Y. Haga and M. Esashi Magnetic Sensor System for Detecting Position and Orientation of a Catheter Tip (in Japanese)
Journal Volume Year Pages Concerned
The Transaction of The IEE of Japan 120E-5 2000 211-218

Author Title of Article
T. Tomiyoshi, K. Minami and M. Esashi Distributed Optical Bending Sensors with Bragg Gratings in Optical Waveguide
Journal Volume Year Pages Concerned
Intn. Conf. on Optical MEMS and Their Applications 1 1997 200-205

Author Title of Article
G. Suzuki and M. Esashi Planer Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating
Journal Volume Year Pages Concerned
Proc. of the Micro Electro Mechanical Systems'2000 13 2000 46-51

Author Title of Article
S. Wang, J. F. Li, X. Li and M. Esashi Processing of PZT Microstructures
Journal Volume Year Pages Concerned
Sensors and Materials 10 1998 375-384

Author Title of Article
D. W. Lee, T. Ono, S. Tanaka, T. Abe and M. Esashi Fabrication of Microprobe Array with Sub-100nm Nano-Heater for Nanometric Thermal Imaging and Data Storage
Journal Volume Year Pages Concerned
Proc. of the Micro Electro Mechanical Systems'2001 14 2001 204-207

Author Title of Article
X. Li, T. Abe, Y. Liu and M. Esashi High Density Electrical Feedthrough Fabricated by Deep Reactive Ion Etching of Pyrex Glass
Journal Volume Year Pages Concerned
Proc. of the Micro Electro Mechanical Systems'2001 14 2001 98-101

Author Title of Article
K. Minami, H. Morishita and M. Esashi A Bellows-shape Electrostatic Microactuator
Journal Volume Year Pages Concerned
Sensors and Actuators 72 1999 269-276

Author Title of Article
T. Ono, D. Y. Sim and M. Esashi Micro-discharge and Electric Breakdown in a Micro-gap
Journal Volume Year Pages Concerned
J. Micromech. Microeng 10 2000 445-451

Author Title of Article
S. Wang, J. F. Li, R. Watanabe and M. Esashi Fabrication of Lead Zirconate Titanate Microrods for 1-3 Piezo-composites Using Hot Isostatic Pressing with Silicon Molds
Journal Volume Year Pages Concerned
J. American Ceramic Soc. 82 1999 213-215

Author Title of Article
S. Wang, J. F. Li, K. Wakabayashi, M. Esashi and R. Watanabe Lost Silicon Mold Process for PZT Microstructures
Journal Volume Year Pages Concerned
Advanced Materials 11 1999 873-876

Author Title of Article
J. -F. Li, S. Wang, K. Wakabayashi, M. Esashi and R. Watanabe Properties of Modified Lead Zirconate Titanate Ceramics Prepared at Low Temperature (800℃) by Hot Isostatic Pressing
Journal Volume Year Pages Concerned
J. American Ceramic Soc. 83 2000 955-957

Author Title of Article
S. Sugimoto, S. Tanaka, J. F. Li, R. Watanabe and M. Esashi Silicon Carbide Micro-reaction-sintering Using a Multilayer Silicon Mold
Journal Volume Year Pages Concerned
Proc. of the Micro Electro Mechanical Systems'2000 13 2000 775-780

Author Title of Article
S. Wang, X. Li, K. Wakabayashi and M. Esashi Deep Reactive Ion Etching of Lead Zirconate Titanate Using Sulfur Hexafluoride Gas
Journal Volume Year Pages Concerned
J. American Ceramic Soc. 82 1999 1339-1341

Author Title of Article
T. Abe, K. Wakabayashi, X. Li and M. Esashi Development of Deep Reactive Ion Etching System for Hard-Etching Materials
Journal Volume Year Pages Concerned
Technical Digest of the 17th Sensor Symposium 17 2000 255-258

Author Title of Article
S. Watanabe, M. Esashi and Y. Yamashita Fabrication Methods for High Aspect Ratio Microstructures
Journal Volume Year Pages Concerned
J. of Intelligent Material Systems and Structures 8 1997 173-176

Author Title of Article
K. Yoshida, K. Minami and M. Esashi Low Temperature Deposition of Conductive Material by UV Laser CVD
Journal Volume Year Pages Concerned
Technical Digest of the 17th Sensor Symposium 17 2000 289-292

Author Title of Article
M. Sasaki, S. Nogawa and K. Hane Direct Photolithography on Optical Fiber
Journal Volume Year Pages Concerned
Intern. Conf. on Optical MEMS 3 2000 149-150

Author Title of Article
T. Takoshima, W. Narazaki, K. Wada, H. Kitazume, S. Motoyama, Y. Liu, S. Hata and A. Shimokohbe Development of Miniaturized Probe Pins for LSI Testing using Micromachine Technology (in Japanese)
Journal Volume Year Pages Concerned
2001 National Convention Record I. E. E. Japan   2001 1078

Author Title of Article
M. Sasaki, H. Takebe, K. Hane Transmission type position sensor for straightness measurement of large structure
Journal Volume Year Pages Concerned
J. Micromech. Microeng. 9 1999 429-433

Author Title of Article
M. Sasaki, W. Kamada, K. Hane Two dimentional control of shape memory alloy actuators for aligning a Si micromachined pinhole for spatial filter
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 7190-7193

Author Title of Article
K. W. Lee, T. Nakamura, K. Sakuma, K. T. Park, H. Shimazutsu, N. Miyakawa, K. Y. Kim, H. Kurino and M. Koyanagi Development of Three-Dimensional Integration Technology for Highly Parallel Image-Processing Chip
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 39 2000 2473-2477

Author Title of Article
Y. Kuwana, A. Hirose, H. Kurino and M. Koyanagi Signal Propagation Characteristics in Polyimide Optical Wave-guide with Micro-Mirrors for Optical Multichip Module
Journal Volume Year Pages Concerned
Jpn. J. Appl. Phys. 38 1999 2660-2663

Author Title of Article
K. Munawar, M. Esashi and M. Uchiyama An Approach Towards Decentralized Control of Cooperating Non-autonomous Multiple Robots
Journal Volume Year Pages Concerned
Robotica 18 2000 495-504

Author Title of Article
K. Munawar, M. Kawaguchi, K. Abe and M. Uchiyama Design and development of a soft joints robotic manipulator
Journal Volume Year Pages Concerned
Proc. Japan IFToMM Symp.   2000 30-37

Author Title of Article
S. Hata, K. Wada, K. Sato and A. Shimokohbe Fabrication of Micro Structures using Thin Film Metallic Glass (2nd. Report) - Fabrication and micro-machining of Pd based thin film metallic glass - (in Japanese)
Journal Volume Year Pages Concerned
Proc. Spring meeting of JSPE   2000 401

Author Title of Article
S. Hata, L. Yongdong, T. Kato and A. Shimokohbe Fabrication of Micro Structures using Thin Film Metallic Glass (3rd. Report)- Fabrication method for three dimensional micro structure using supercooled liquid state - (in Japanese)
Journal Volume Year Pages Concerned
Proc. Autumn meeting of JSPE   2000 401

Author Title of Article
M. Horie T. Uchida and D. Kamiya A Pantograph Mechanism with Large-deflective Hinges for Miniature Surface mount Systems (in Japanese)
Journal Volume Year Pages Concerned
Trans. of JSME 66 2000 2804-2809

Author Title of Article
T. Matuo, H. Hasizume and H. Shinno Performance Evaluations of the Developed Micro-Sensor for In-Process Machining Status Monitoring (in Japanese)
Journal Volume Year Pages Concerned
The 2nd Manufacturing & Machine Tool Conference   2000 161-162

Author Title of Article
K. Takahashi and T. Hatuzawa Improvement of Production Reproducibility of Tungsten Probe using electropolishing (in Japanese)
Journal Volume Year Pages Concerned
The Trans. of The IEE of Japan 120-E 2000 398-404

Author Title of Article
T. Oguchi, M. Hayase and T. Hatuzawa A hysteresis movement analysis of micro-cantilever with constant bending moment driven by electro-static force (in Japanese)
Journal Volume Year Pages Concerned
The Trans. of The IEE of Japan 120-E 2000 489-502

Author Title of Article
K. Sato, M. Furuya, F. Shinano, T. Shinshi H. Tachikawa and A. Shimokohbe Control Performance of Two-stage Positioning System (Comparison of Positioning performances with Four Kinds of Control Methods) (in Japanese)
Journal Volume Year Pages Concerned
Trans. of JSME 66 2000 885-892

Author Title of Article
K. Sato, S. Sinozuka, T. Shinshi and A. Shimokohbe Control Performance of Two-stage Positioning System with Intelligent Control Methods (in Japanese)
Journal Volume Year Pages Concerned
Trans. of JSME 66 2000 2736-2741

Author Title of Article
K. Sato, K. Ito, S. Hata and A. Shimokohbe Self-alignment of Microparts Using Liquid Surface Tension (Relationship between Alignment Accuracy and Behavior of Microparts and Liquid) (in Japanese)
Journal Volume Year Pages Concerned
Proc. of JSME IIP200   2000 137-140

Author Title of Article
K. Sato, K. Ito, S. Hata and A. Shimokohbe Self-alignment of Microparts Using Liquid Surface Tension-Effect of High Wettability Area Pattern on Alignment Performance- (in Japanese)
Journal Volume Year Pages Concerned
Proc. Autumn meeting of JSPE   2000 400

Author Title of Article
L. Yongdong, S. Hata, K. Wada and A. Shimokohbe Physical properties of Pd-based thin film metallic glass
Journal Volume Year Pages Concerned
Proc. Autumn meeting of JSPE   2000 402

Author Title of Article
L. Yongdong, S. Hata, K. Wada and A. Shimokohbe Thin Film Metallic Glasses: Fabrication and Property Test
Journal Volume Year Pages Concerned
The 14th IEEE International Conference on MEMS 2001 14 2001 102-105

Author Title of Article
M. Horie, D. Kamiya, M. Urata and K. Ikegami New Miniature Pantograph Mechanisms with Large-Deflective Hinges for Micro-Bonding by Adhesives
Journal Volume Year Pages Concerned
International Symposium On Electronic Materials and Packaging ( EMAP2000 )   2000 167-174

Author Title of Article
M. Horie S. Torii and D. Kamiya Displacement Characteristics of Micro-Hinges with Suitable Flexural Rigidity for Micromechanisms
Journal Volume Year Pages Concerned
Proceeding of Sixth International Conference on Control, Automation, Robotics and Vision (ICARCV2000) 6 2000 52-56

Author Title of Article
M. Horie, T. Uchida and D. Kamiya Development of a Pantograph Mechanism with Large-deflective Hinges for Miniature Surface Mount Systems
Journal Volume Year Pages Concerned
Proceeding of Design, Test, Integration, and Packaging (DTIP) of MEMS/MOEMS 4019 2000 546-555

Author Title of Article
H. Hashizume, H. Yoshioka and H. Shinno In-Process Monitoring of Thermal Behavior near the Cutting Point during Ultraprecision Machining
Journal Volume Year Pages Concerned
Proc. of 2nd Euspen International Conference   2001 In press

[Reference Books]
Author Title of Book
T. Ono and M. Esashi Sensors Update
Publisher Year Pages
Wiley-VCH 1999 163-188

Author Title of Book
Y. Haga, T. Mineta Ono and M. Esashi Sensors Update
Publisher Year Pages
Wiley-VCH 1999 147-186

Author Title of Book
M. Esashi AERA Mook, Understand Engineering (in Japanese)
Publisher Year Pages
Asahi News Paper 2001 58-61

Author Title of Book
K. Sato Present and Future Technology of Ultraprecision Positioning (in Japanese)
Publisher Year Pages
Fiji Techno Systems 2000 488-492


back